发明名称 COATING DEVICE AND METHOD FOR PRIMING NOZZLE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for priming a nozzle which reduces a distance and the amount of chemical to be taken up by a roller, and facilitating cleaning of the roller. <P>SOLUTION: In a liquid landing step, chemical R is discharged onto a priming roller 23 from a nozzle, while a slit-like discharge port of a nozzle 10 faces directly above the priming roller 23, along a longitudinal direction of the priming roller 23, to interpose the chemical in a gap between the nozzle 10 and the roller 23. A suck back step is executed to suck the chemical R discharged onto the surface of the priming roller 23 temporarily to the nozzle side. The distance of the chemical R to be taken up by the roller 23 can be shortened, thereby increasing the number of priming treatments per a roller 23. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012030202(A) 申请公布日期 2012.02.16
申请号 JP20100174145 申请日期 2010.08.03
申请人 TOKYO ELECTRON LTD 发明人 TASHIRO KEI
分类号 B05C11/10;B05C5/02 主分类号 B05C11/10
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