| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for treating an article, in which production cost can be further reduced by downsizing components of the batch-type treatment apparatus. <P>SOLUTION: The apparatus for treating an article satisfies the relations: L11=L22 and L12=L21, wherein L11 is the distance of conveyance of a PET bottle PB from position S to position P1; L21 is the distance of conveyance of the PET bottle PB from position S to position P2; L12 is the distance of conveyance of the PET bottle PB from position P1 to position E, and L22 is the distance of conveyance of the PET bottle PB from position P2 to position E. Here, position S is the position at which conveyance of the PET bottle PB, i.e. an article to be treated, by a conveyance mechanism 40 is started; position E is the position at which the PET bottle PB is transferred by a first reverse transfer device 70; position P1 is the position corresponding to a first deposition unit 51, and position P2 is the position corresponding to a second deposition unit 52. The apparatus alternately performs: a first treatment step of depositing DLC in the first deposition unit 51; and a second treatment step of depositing DLC in the second deposition unit 52. <P>COPYRIGHT: (C)2012,JPO&INPIT |
