发明名称 AMORPHOUS BORON CARBIDE FILMS FOR P-N JUNCTIONS AND METHOD FOR FABRICATING SAME
摘要 Amorphous semiconductor films with enhanced charged carrier transport are disclosed. Also disclosed is a method for fabricating and treating the film to produce the enhanced transport. Also disclosed are semiconductor p-n junctions fabricated with the films which demonstrate the enhanced transport. The films are amorphous and include boron, carbon, and hydrogen.
申请公布号 US2012037904(A1) 申请公布日期 2012.02.16
申请号 US20100853857 申请日期 2010.08.10
申请人 CARUSO ANTHONY N.;SANDSTROM JOSEPH A.;BUNZOW DAVID A.;NORTH DAKOTA STATE UNIVERSITY RESEARCH FOUNDATION 发明人 CARUSO ANTHONY N.;SANDSTROM JOSEPH A.;BUNZOW DAVID A.
分类号 H01L29/04;H01L21/20;H01L29/66 主分类号 H01L29/04
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