ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF
摘要
The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1): where A is a fused aromatic ring and B has a structure (2), where R1 is C1-C4alkyl and R2 is C1-C4alkyl The invention further relates to a process for forming an image using the composition.
申请公布号
WO2011077241(A8)
申请公布日期
2012.02.16
申请号
WO2010IB03373
申请日期
2010.12.23
申请人
AZ ELECTRONIC MATERIALS USA CORP.
发明人
RAHMAN, M., DALIL;MCKENZIE, DOUGLAS;YAO, HUIRONG;CHO, JOON YEON;YI, YI;LIN, GUANYANG