| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe card and manufacturing method thereof for solving various problems incurred in the probe card including tilted vertical cantilever-shaped probe pins such as adjacent probe pins are brought into contact. <P>SOLUTION: A probe card 1A includes a wiring board 2 and a plurality of probe pins 3 which are tilted vertical cantilever shaped, being tilted in one of horizontal directions (tilting direction SD) with respect to the wiring board 2, and being formed in a fan shape in which the width becomes wider as getting closer to the wiring board 2. <P>COPYRIGHT: (C)2012,JPO&INPIT |
