| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for processing a spheral ultramicroprobe, which can perform both manufacturing of a spheral ultramicroprobe and quality evaluation of the manufactured spheral ultramicroprobe, on the same processing device. <P>SOLUTION: The device for processing a spheral ultramicroprobe, includes: an electric signal supervisory control unit 1; a processing table 2; a triaxial movement platform 3 movably disposed on the processing table 2 and also electrically connected to the electric signal supervisory control unit 1; a detachable holder 4 movably disposed on the triaxial movement platform 3 and used for clamping a workpiece 8; a wire electric discharge processing unit 5 disposed on the processing table 2 and also electrically connected to the electric signal supervisory control unit 1, and used for forming a conical electrode tool having a tip in the workpiece 8 through electric discharge processing; an electric discharge processing unit 6; and an optical measuring unit 7. <P>COPYRIGHT: (C)2012,JPO&INPIT |
