APPARATUS FOR PREVENTING PARTICLES FROM BEING INDUCED TO OPENER OF WAFER TRANSFER RECEPTACLE

摘要

PURPOSE: An apparatus for preventing particles from being induced to an opener of a wafer transfer receptacle is provided to prevent the particles from remaining in a fine gap temporarily generated in a process for opening the wafer transfer receptacle. CONSTITUTION: A frame(110) of the wafer transfer receptacle(200) is installed in the inlet of process equipment(300) having different cleanliness. A particle exhaust unit is buried in a predetermined position of the frame to exhaust the particles of a space part generated when the wafer transfer receptacle is closely adhered to the frame.