SEMICONDUCTOR PROCESS AND CHAMBER ELECTRODE AND METHOD FOR MAKING THE SAME,申请号IL19990140277-传众专利搜索

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发明名称	SEMICONDUCTOR PROCESS AND CHAMBER ELECTRODE AND METHOD FOR MAKING THE SAME
摘要
申请公布号	IL140277(D0)	申请公布日期	2002.02.10
申请号	IL19990140277	申请日期	1999.06.15
申请人	LAM RESEARCH CORPORATION	发明人
分类号	H05H1/46;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01J	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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