PHOTOACID GENERATOR AND PHOTORESIST COMPRISING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a new photoacid generator (PAG) compound, and to provide a photoresist composition containing the PAG compound.

SOLUTION: This invention relates to new ionic photoacid generator compounds that comprise a nitrogen-based functional component of the structure -C(=O)N< such as lactam, amide and imide. Preferred photoacid generators are salts where the anion component comprises a moiety of the structure -C(-O)N< such as a lactam, amide and imide. The photoresist composition contains the one or more PAG.

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