发明名称 COMPONENT HAVING A VIA, AND A METHOD FOR MANUFACTURING SUCH A COMPONENT
摘要 A component including a via for electrical connection between a first and a second plane of a substrate is provided. The substrate has a borehole having an inner wall that is coated with a conductive layer made of an electrically conductive material, an intermediate layer being disposed between the inner wall and the conductive layer. The intermediate layer includes electrically insulating SiC.
申请公布号 US2012038049(A1) 申请公布日期 2012.02.16
申请号 US20090998868 申请日期 2009.10.20
申请人 TRAUTMANN ACHIM;MUELLER THORSTEN 发明人 TRAUTMANN ACHIM;MUELLER THORSTEN
分类号 H01L23/48;H01L21/768 主分类号 H01L23/48
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