| 摘要 |
In order to provide complete removal of a sacrificial layer on a disk lower surface during etching, without leaving residue, an electrostatic drive-type disk-type vibrator comprises: a disk-type vibrator structure (1); a pair of drive electrodes (2, 2) at a prescribed gap (g) from the peripheral section of the disk-type vibrator structure and arranged on both sides of the vibrator structure (1) so as to face each other; a means for applying alternating current bias voltages of the same phase to the drive electrodes (2, 2); and a detection means that obtains an output corresponding to the capacitance between the disk-type vibrator structure (1) and the drive electrodes (2, 2). The disk-type vibrator structure (1) has a through hole (1a) in the center of the disk and vibrates in a wine-glass mode. |
