| 摘要 |
PROBLEM TO BE SOLVED: To provide a differential pressure type micro-leak detection method and a device capable of filling gas in a short time without generating the temperature difference between a test vessel and a reference vessel, and executing leak detection by the differential pressure in a short time. SOLUTION: This device is equipped with the reference vessel 12 capable of being inserted airtightly into the test vessel 1, an equalizing valve 3 capable of opening and closing a communicating tube for communicating the test vessel with the reference vessel, and a differential pressure gage 4 for detecting the differential pressure generated between the test vessel and the reference vessel. The reference vessel 12 is formed from a thin-walled highly heat-conductive material resistant to the maximum differential pressure, and the reference vessel 12 is inserted into the test vessel 1.
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