| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new polymerizable monomer that provides a unit having crosslinking ability useful as a constituent unit of a base polymer used for a chemically-amplified negative resist composition achieving little line edge roughness and also highly sensitizable. <P>SOLUTION: The polymerizable monomer is represented by general formula (1), wherein R<SP POS="POST">1</SP>is a hydrogen atom or a 1C-6C straight chain, branched chain, or cyclic monovalent hydrocarbon group, and R<SP POS="POST">2</SP>is a group having a polymerizable functional group. Using the polymerizable monomer, a crosslinking unit can be easily incorporated into a polymer chain. A resist composition using a polymer in which the crosslinking unit is incorporated has high sensitivity and provides a pattern with little line edge roughness when the pattern is formed by using the resist composition. <P>COPYRIGHT: (C)2012,JPO&INPIT |
