发明名称 |
PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, LIQUID INJECTION HEAD, AND LIQUID INJECTION DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element with high reliability capable of decreasing stress on an electrode. <P>SOLUTION: The piezoelectric element includes: a first electrode 20; a first piezoelectric layer 30 formed on an upper and side parts of the first electrode 20; a porous body layer 50 formed covering the side surface of the first piezoelectric layer 30; and a second electrode 40 formed on upper parts of the first piezoelectric layer 30 and the porous body layer 50. The porous body layer 50 includes at least one of metallic elements constituting the first piezoelectric layer 30. <P>COPYRIGHT: (C)2012,JPO&INPIT |
申请公布号 |
JP2012033866(A) |
申请公布日期 |
2012.02.16 |
申请号 |
JP20110060616 |
申请日期 |
2011.03.18 |
申请人 |
SEIKO EPSON CORP |
发明人 |
NAKAYAMA MASAO |
分类号 |
H01L41/09;B41J2/045;B41J2/055;B41J2/135;B41J2/14;H01L41/18;H01L41/187;H01L41/22 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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