| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell having improved power generation efficiency. <P>SOLUTION: Such a part of a first semiconductor layer 22 as not covered with an insulation layer 23 is etched using an etching agent and removed thus exposing a part of the first principal surface 10b of a semiconductor substrate 10. The first principal surface 10b of the semiconductor substrate 10 is cleaned using cleaning fluid containing hydrofluoric acid. The insulation layer 23 is formed so that the etching rate of the etching agent for the first semiconductor layer 22 is higher than the etching rate for the first surface layer 23A of the insulation layer 23 on the opposite side of the first semiconductor layer 22, and the etching rate of cleaning liquid for the second surface layer 23B of the insulation layer 23 on the first semiconductor layer 22 side becomes lower than the etching rate for the first surface layer 23A of the insulation layer 23. <P>COPYRIGHT: (C)2012,JPO&INPIT |
