| 摘要 |
<P>PROBLEM TO BE SOLVED: To allow non-mounting or abnormal mounting of a substrate of a different size to be accurately detected by a sensor, regardless of the difference in mounted substrate size even if the substrate is mounted as an observation sample on a substrate holder having the same outer dimensions as a normal substrate holder. <P>SOLUTION: An inclination detecting pin 51 on which an abnormally mounted wafer 2S should ride is disposed in an erected manner in an undefined region Q other than a defined region P in which a wafer 2S is normally placed, on a holder 50. Accordingly, the abnormally mounted wafer 2S is brought into an attitude state in which a wafer inclination detecting sensor 47 for detecting abnormal mounting of wafer 2 on the holder 50 can detect the abnormal mounting. <P>COPYRIGHT: (C)2012,JPO&INPIT |
