| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for evaluating characteristics of an electronic component, which evaluates a physical state of the inside of the electronic component and is capable of contributing to characteristic analysis of the electronic component. <P>SOLUTION: A probe 4 whose surface has a metal part 7 is brought into contact with a predetermined position near one electrode 3b (cathode) on the surface of dielectric ceramic 2 with respect to a ceramic capacitor in which electrodes 3a, 3b are formed on both ends of the dielectric ceramic 2; a plurality of different voltages are applied between the probe 4 and the electrode 3b to measure a current value; current-voltage characteristics are made fit to a Faraday-Nordheim expression to estimate a Schottky barrier height ϕ; and then a depletion layer width w and oxygen defect concentration N<SB POS="POST">D</SB>are calculated, so that the characteristics of the electronic component can be evaluated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
