发明名称 REVERSED-POLARITY PULSE GENERATING CIRCUIT FOR DC PLASMA, AND DC PLASMA POWER SUPPLY DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To suppress a surge voltage and reduce a voltage applied to a switching element. <P>SOLUTION: A capacitor is connected between DC voltage terminals to which a DC voltage is inputted. Inductance means is connected between one end of the capacitor and one of load terminals. A unit switching circuit is connected in parallel to the capacitor. The unit switching circuit has a series circuit of first and second switching elements and a first coil, first and second feedback rectifier elements, and a voltage balance resistance. When the DC voltage is higher than a setting value, a both-end voltage of the capacitor is shared by non-conductive first and second switching elements. When the DC voltage is lower than the setting value, the first and second switching elements are brought into conduction periodically or as needed to output a reversed-polarity voltage to between the load terminals. In the case that the first and second switching elements are turned off, both-end voltages of the first and second switching elements are restricted by the both-end voltage of the capacitor in a period where the first and second feedback rectifier elements are in conduction. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012033409(A) 申请公布日期 2012.02.16
申请号 JP20100172652 申请日期 2010.07.30
申请人 ORIGIN ELECTRIC CO LTD 发明人 NAKAMURA KENICHI;SAKAI KAZUO;WATANABE KIYOMI
分类号 H05H1/46;C23C14/54;C23C16/503;H01L21/3065;H05H1/24 主分类号 H05H1/46
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