| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mass flow controller capable of changing a gas flow rate more quickly than conventional ones. <P>SOLUTION: According to the embodiment, a mass flow controller 100 includes a gas passage composing member 110, a flow rate adjustment part 130, a displacement magnitude storage part 144 and a setting circuit 145. The flow rate adjustment 130 has a valve 131 arranged in a gas passage 113 for adjusting a gas flow rate and an actuator 133 for controlling the displacement magnitude of the valve 131. The displacement magnitude storage part 144 stores information of the displacement magnitudes of the valve 131 calculated for every processing procedure before performing any processing procedure, which shows its displacement magnitude when allowing gas of a flow rate regulated by the processing procedure to flow into the gas passage 113. The setting circuit 145 obtains the displacement magnitude corresponding to the processing procedure from the displacement magnitude storage part 144 to control the actuator 133 based on the displacement magnitude obtained. <P>COPYRIGHT: (C)2012,JPO&INPIT |
