| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately measure the inner diameter and outer diameter of a thin ring-shaped body to be measured with high reproductivity without restricting the body to be measured. <P>SOLUTION: The body to be measured is placed horizontally on a measurement body placement table comprising a surface plate on which the body to be measured is placed and excitation means fixed to the surface plate, the excitation means vibrates the surface plate to prevent the body to be measured and the surface plate from sticking to each other, and also to prevent elastic deformation from remaining owing to sticking of the body to be measured and the surface plate even when the body to be measured elastically deforms on the measurement body placement table owing to external force. <P>COPYRIGHT: (C)2012,JPO&INPIT |
