| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a fine structure with high precision and in a high yield by simplifying a production process. <P>SOLUTION: A method for producing a structure includes steps of, in this order, preparing a substrate composed of a first resin layer and a second resin layer laminated in this order, the first resin layer being made of a positive photosensitive resin having positive photosensitivity to light having a wavelength of 280 nm or more, and the second resin layer containing an anthracene compound, partially exposing the second resin layer to light having a wavelength of 300 nm or more, radiating light having a wavelength of 280 nm or more to the first resin layer through the exposed portions of the second resin layer using the unexposed portions of the second resin layer as a mask, thereby exposing the first resin layer to light, and removing the exposed portions of the first resin layer to form a structure. <P>COPYRIGHT: (C)2012,JPO&INPIT |
