| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and method for measuring the permeability of a magnetic substance in which the permeability of the magnetic substance having any arbitrary size and shape can be measured and the distribution of the permeability within a wafer can be evaluated by scanning a probe without applying cutting or machining in the wafer or the like on a production process line. <P>SOLUTION: A dielectric substance or an insulator is held between a conductor and a ground conductor, and a magnetic substance is proximately disposed through the insulator to the conductor and the ground conductor or to the conductor. A magnetic field is applied from the conductor to the magnetic substance by a magnetic field applying section, and a differential amplitude information or complex information of a signal in accordance with the presence/absence of magnetic field application by the magnetic field applying section is measured by a signal measuring instrument. The permeability of the magnetic substance is determined from the differential of the signal measured by the signal measuring instrument through optimization processing. A probe is scanned with respect to the magnetic substance, thereby evaluating the distribution of the permeability within a wafer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
