| 摘要 |
PURPOSE: An apparatus and method for dividing a substrate are provided to prevent particles from being scattered by including a sheet member which covers the substrate. CONSTITUTION: A substrate is loaded on an adsorption chuck(10). A pressurizing member(30) faces the loading surface of the adsorption chuck. A pressurizing member moving unit is connected to the pressurizing member and transfers the pressurizing member toward the absorption chuck. A sheet member(50) is arranged between the absorption chuck and the pressurizing member and covers the substrate loaded on the absorption chuck. A sheet member moving unit is connected to the sheet member and transfers the sheet member toward the substrate loaded on the absorption chuck. The sheet member supplying unit supplies the sheet member between the absorption chuck and the pressurizing member.
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