发明名称 |
CARBURETOR, CARBURETOR FOR MOCVD USING SAME, CENTER ROD FOR USE IN THE CARBURETOR OR CARBURETOR FOR MOCVD, METHOD FOR DISPERSING CARRIER GAS, AND METHOD FOR VAPORIZING CARRIER GAS |
摘要 |
Provided is a vaporizer that can efficiently cool a carrier gas, improve the effect of preventing a material from being clogged near the outlet port of a gas passage, contribute to prolonging the timing of maintenance and improving operating efficiency, and exert more uniform dispersing effect. A vaporizer includes: a center rod inserted into a carrier gas introduction hole formed in a disperser to form the gas passage in cooperation with the inner wall of the carrier gas introduction hole; a cooling part disposed on the outer circumferential side of the carrier gas introduction hole in the disperser to cool the inside of the gas passage; a cooling member insertion hole formed across almost the entire length of the center rod along the axial direction of the center rod; and a cooling member disposed in the inside of the cooling member insertion hole to cool the center rod. |
申请公布号 |
US2012040098(A1) |
申请公布日期 |
2012.02.16 |
申请号 |
US201013147668 |
申请日期 |
2010.01.27 |
申请人 |
TODA MASAYUKI;UMEDA MASARU;WACOM R&D CORPORATION |
发明人 |
TODA MASAYUKI;UMEDA MASARU |
分类号 |
C23C16/18;B05C9/02;C23C16/44 |
主分类号 |
C23C16/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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