Arrangement for multidimensional measurement of oscillations of object, has deflecting units for deflecting beam such that measuring point of object is detectable with beam from spatial directions or one of spatial directions

摘要

The arrangement has a first deflecting unit (3) for deflecting a measuring beam of a vibrometer (2) in spatial directions (4-6, 4'-6'). Second and third deflecting units (7, 8) deflect the beam arriving from one of the spatial directions such that a measuring point (9) of an object (1) is detectable with the beam from the spatial direction or the spatial directions. The first deflecting unit is designed as a scanning unit, where the measuring point is detected by the scanning unit. A measuring instrument measures focus quality and is connected to actuators for adjustment of the focus quality. An independent claim is also included for a method for multidimensional measurement of oscillations of an object.