| 摘要 |
<p>A three-friction piezoelectric stepper pushed by nested dual piezoelectric tubes and a stepping scanner using the stepper. The stepper includes two piezoelectric tubes, two protective slices, a substrate (5) and a guider (6). One of the two piezoelectric tubes fixedly stands on the substrate to form an inner piezoelectric tube (1), and the other one nested outside the inner piezoelectric tube also fixedly stands on the substrate to form an outer piezoelectric tube (2). The piezoelectric telescopic directions of the two piezoelectric tubes are the same, which are axial. The two protective slices are positioned on the free ends of the two piezoelectric tubes respectively. The guider can be positioned inside the inner piezoelectric tube, or outside the outer piezoelectric tube; or the guider can be positioned in the gap between the outer wall of the inner piezoelectric tube and the inner wall of the outer piezoelectric tube. In the direction perpendicular to the piezoelectric telescopic direction, a positive pressure is applied to make the substrate and the two protective slices be pressed to the guider respectively. A greater thrust can be produced without obviously increasing dimension and using a stack. A high-accuracy step and scan work can be accomplished in a lower temperature.</p> |
