METHOD FOR FORMING ORGANIC SEMICONDUCTOR THIN FILM, SEMICONDUCTOR ELEMENT, AND ORGANIC FIELD EFFECT TRANSISTOR

摘要

PROBLEM TO BE SOLVED: To provide an organic semiconductor thin film with high mobility by having high crystallinity.

SOLUTION: A thin film that has a layer separation including a polymer in a lower layer and an organic semiconductor in an upper layer is formed by applying a mixed solution including the polymer and the organic semiconductor on a substrate by spin coating and the like (a) in the figure). An organic semiconductor molecule moves on a polymer layer and an organic semiconductor film is reconfigured by performing solvent vapor annealing with the use of a solvent that can dissolve both the organic semiconductor and the polymer. Accordingly, an organic semiconductor thin film with less grain boundary in which a single crystal has largely grown is obtained as shown in b).

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