| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chuck table capable of reliably suction-holding a wafer in a suction region even if the wafer has a several millimeter error in its diameter. <P>SOLUTION: A chuck table for holding a wafer comprises: a suction chuck composed of a main suction-holding member made of a porous member formed into a disk shape, and an annular auxiliary suction-holding member which is arranged on a circumference of the main suction-holding member with a barrier rib interposed therebetween so as to adjust the size error of the wafer; and a frame body having on its top face a circular recess in which the suction chuck is fitted. On a bottom wall of the frame body, a main suction passage is provided at a position corresponding to the main suction-holding member, and an auxiliary suction passage is provided at a position corresponding to the annular auxiliary suction-holding member. A blind plug can be detachably attached to the auxiliary suction passage. <P>COPYRIGHT: (C)2012,JPO&INPIT |
