| 摘要 |
<P>PROBLEM TO BE SOLVED: To separate and measure at least one of a pure resistance component and a reactance component of a circuit to be measured. <P>SOLUTION: A current detection section 6 outputs a first detecting signal Vd1 of which the amplitude is changed in accordance with an amplitude of a real-number component of an alternating current (AC) Io by performing synchronization detection on a current detecting signal Vb1 using a first signal S1, and outputs a second detecting signal Vd2 of which the amplitude is changed in accordance with an amplitude of an imaginary-number component of the AC Io by performing synchronization detection on the current detecting signal Vb1 using a second signal S2 orthogonal with the first signal S1. A processing section 7 calculates an absolute value of a current value of the AC Io on the basis of the detecting signals Vd1 and Vd2, calculates an absolute value ¾Z¾ of impedance based on the calculated absolute value and a voltage value of an AC signal for inspection, calculates a phase angle θ between the AC Io and the AC signal Vo for inspection based on the detecting signals Vd1 and Vd2, and calculates a pure resistance component Rr and a reactance component Rx on the basis of the calculated impedance absolute value ¾Z¾ and phase angle θ. <P>COPYRIGHT: (C)2012,JPO&INPIT |
