| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charged particle beam device and a method of controlling the same capable of shortening a time required for correction of an image shift difference and enhancing accuracy for the same without preparing a correction table, and to provide a charged particle beam device and a method of controlling the same capable of shifting an image to a measurement point relatively distant from an optical axis, that is an original point of an electron beam, with accuracy. <P>SOLUTION: A charged particle beam device has: an image processing part that calculates a centroid of a reference image at an original point scanning position of a charged particle beam and a centroid of an n-th image at an n-th scanning position respectively, and calculates an image shift difference amount from a difference between both centroids; and a controller that produces an n-th correction formula for correcting the image shift difference amount corresponding to the n-th scanning position from a deflection amount and the image shift difference amount, and adds or subtracts a correction amount calculated from the correction formula to or from the deflection amount. <P>COPYRIGHT: (C)2012,JPO&INPIT |
