发明名称 HOLLOW TARGET ASSEMBLY
摘要 A hollow target assembly has a support tube, a target body and a plurality of elastic elements. The target body includes a plurality of hollow target materials and they pass through the support tube sequentially and locate at the outer surface of the support tube. By the grooves formed and extended from an end of the inside wall of the hollow target material and the corresponding concaves formed at the outside wall of the support tube, the elastic elements can lean and be positioned in the space generated by the grooves and corresponding concaves. Therefore, the target body and the support tube are brought together closely by these elastic elements in a simple and a low-cost way.
申请公布号 US2012037500(A1) 申请公布日期 2012.02.16
申请号 US20100855098 申请日期 2010.08.12
申请人 WU CHUNG-HAN;LAI KUAN-TING;WANG TZU-WEN;SOLAR APPLIED MATERIALS TECHNOLOGY CORP. 发明人 WU CHUNG-HAN;LAI KUAN-TING;WANG TZU-WEN
分类号 C23C14/34 主分类号 C23C14/34
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