ELECTROSTATIC CHUCK AND PRODUCTION METHOD THEREOF

摘要

The electrostatic chuck (1) of the present invention is provided with a dielectric substrate (3) having protrusions (3a) formed on the main surface of the side for mounting an object to be attached, and planar portions (3b) formed on the periphery of the protrusions (3a). The electrostatic chuck (1) is characterised by: the dielectric substrate (3) being formed from a sintered polycrystalline ceramic body; and the interference fringe occupancy ratio, obtained using a laser microscope, being less than 1% on the main surface. Provided are an electrostatic chuck that can curb particle generation, and an electrostatic chuck production method.