| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the consumption amount of a washing solution used in the priming treatment of a nozzle and to uniformly discharge a treatment solution from a slit-like nozzle discharge port in formation of a coating film on a substrate. <P>SOLUTION: A priming treatment means 20 includes a priming roller 23, the treatment solution absorbing member 24 provided so as to extend along the priming roller and capable of absorbing the treatment liquid to hold the same and an advance and retreat moving means 29 for moving the longitudinal side of the treatment solution absorbing member so as to advance and retreat the same with respect to the surface of the priming roller. Priming treatment is applied to the surface of the priming roller rotated in a predetermined direction by discharging the treatment solution R from the discharge port 16a of the nozzle 16 and the treatment solution adhered to the surface of the priming roller is absorbed and removed by the treatment solution absorbing member brought into contact with or allowed to approach the surface of the priming roller by the advance and retreat moving means. <P>COPYRIGHT: (C)2012,JPO&INPIT |
