发明名称 |
MASK INSPECTION APPARATUS AND METHOD |
摘要 |
Apparatus for optical inspection of an object, comprising: an optical imaging system (5) for generating an actual image of the real object, a calculation unit (12) for calculating an estimated image of an object of desired shape in respect of a known aberration coefficient of the optical imaging system, an image analysis unit (13) for detecting differences between the actual image and the image calculated by the calculation unit (12). |
申请公布号 |
US2012039522(A1) |
申请公布日期 |
2012.02.16 |
申请号 |
US20050597615D |
申请日期 |
2005.02.02 |
申请人 |
DIRKSEN PETER;STEFFEN THOMAS;KONINKLIJKE PHILIPS ELECTRONIC, N.V. |
发明人 |
DIRKSEN PETER;STEFFEN THOMAS |
分类号 |
G06K9/00;G03F1/00 |
主分类号 |
G06K9/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|