| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor X-ray detector which can be configured in a desired shape suitable for detecting diffraction X rays within a short distance by forming an opening in the center. <P>SOLUTION: A semiconductor X-ray detector includes: a semiconductor X-ray sensor section 10 which has an opening 11 approximately in the center and in which a plurality of pixel-like X-ray sensors are formed inside; and a read section 20 which is disposed on a rear face of the semiconductor X-ray sensor section and outputs a detecting signal by performing predetermined processing on each of signals outputted from the plurality of X-ray sensors. The read section is configured by integrally assembling a plurality of readout units 22 in a planar shape, and each of the readout units is formed in a rectangular shape, forms a plurality of pads on its front surface, includes a plurality of processing circuits and through-via-holes inside and includes a plurality of pads on its rear face. The semiconductor X-ray sensor section and the read section are stacked and integrally formed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
