ELECTROSTATIC CHUCK

摘要

The electrostatic chuck (1) of the present invention is provided with a dielectric substrate (3) having protrusions (3a) formed on the main surface of the side for mounting an object to be attached, and planar portions (3b) formed on the periphery of the protrusions (3a). The electrostatic chuck (3) is characterised by: the dielectric substrate (3) being formed from a sintered polycrystalline ceramic body; the top surface of the protrusions (3a) having a curved surface, and a first recess being formed in the top surface; the planar portions (3b) having a flat portion, and a second recess being formed in the flat portion; and the depth dimensions of the first recess being greater than the depth dimensions of the second recess. Particle generation can be curbed and the clean state of the surface of the electrostatic chuck can be easily restored.