VERFAHREN ZUM HERSTELLEN EINES MIKROSENSORS

摘要

A linear accelerometer (10) is provided having a support substrate (14), fixed electrodes (22A-22D) having fixed capacitive plates (30A-30D), and a movable inertial mass (12) having movable capacitive plates (20A-20D) capacitively coupled to the fixed capacitive plates (30A-30D). Adjacent capacitive plates vary in height. The accelerometer (10) further includes support tethers (16A-16B) for supporting the inertial mass (12) and allowing movement of the inertial mass upon experiencing a linear acceleration along a sensing axis. The accelerometer (10) has inputs (26, 28) and an output (34) for providing an output signal which varies as a function of the capacitive coupling and is indicative of both magnitude and direction of vertical acceleration along the sensing Z-axis. A microsensor fabrication process (100) is also provided which employs a top side mask and etch module (70).