发明名称 SOLID-STATE IMAGING DEVICE EQUIPPED WITH MESA-TYPE PHOTO DETECTOR
摘要 PROBLEM TO BE SOLVED: To provide a structure of a solid-state imaging device which can suppress a crosstalk phenomenon. SOLUTION: The solid-state imaging device comprises a semiconductor substrate, a plurality of photo detectors for generating signal charge in accordance with incident light each of which is formed in each pixel on the light receiving face side of the semiconductor substrate, a reading-out circuit which outputs image signals based on the signal charges generated by the plurality of photo detectors, and a shading film which is arranged on the light receiving face side and has an opening in an incident light path of the photo detector. At least some of the photo detectors satisfy following conditions about their semiconductor surfaces: (1) semiconductor surfaces of these photo detectors are formed in mesa shapes protruding above those near the photo detectors, and (2) top faces of the mesas reach such a height that blocks inclined incident light which gets under the shading film and generates noise in the image signal. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005209810(A) 申请公布日期 2005.08.04
申请号 JP20040013450 申请日期 2004.01.21
申请人 NIKON CORP 发明人 OKOCHI NAOKI
分类号 H01L27/146;H04N5/335;H04N5/359;H04N5/361;H04N5/369;(IPC1-7):H01L27/146 主分类号 H01L27/146
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