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发明名称
INDUCTIVE PLASMA APPLICATOR
摘要
申请公布号
KR20120013950(A)
申请公布日期
2012.02.15
申请号
KR20117024082
申请日期
2010.03.18
申请人
ECOLE POLYTECHNIQUE;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
发明人
DINE SEBASTIEN
分类号
H01J37/32;H05H1/24
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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