| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment equipment capable of enhancing the soaking property of the temperature distribution of a substrate. SOLUTION: A resistance heating element 5 is constituted so that areas R1, R2 having the maximum heat generation density in a plane are arrayed on the axis of a plate member 4a. The plate member 4a is arranged so that its axial direction is aligned to the direction AA' for connecting an exhaust unit 3 to an inner surface of a reaction container 2 facing the exhaust unit 3. COPYRIGHT: (C)2007,JPO&INPIT |
