MAPPING-PROJECTION-TYPE ELECTRON BEAM APPARATUS FOR INSPECTING SAMPLE BY USING ELECTRONS REFLECTED FROM THE SAMPLE,申请号KR20057013694-传众专利搜索

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发明名称	MAPPING-PROJECTION-TYPE ELECTRON BEAM APPARATUS FOR INSPECTING SAMPLE BY USING ELECTRONS REFLECTED FROM THE SAMPLE
摘要
申请公布号	KR101110224(B1)	申请公布日期	2012.02.15
申请号	KR20057013694	申请日期	2004.01.27
申请人		发明人
分类号	H01J37/244;C01B31/02;G01N23/225;H01J1/30;H01J37/32	主分类号	H01J37/244
代理机构		代理人
主权项
地址

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