| 摘要 |
PROBLEM TO BE SOLVED: To sustain reproducibility of positional correction accuracy without relying upon the adjustment level of arrangement of a line sensor. SOLUTION: The semiconductor production equipment comprises a means for transferring a substrate to an arbitrary place; at least one detection means 11, 12 arranged on the substrate conveyance track in the transfer means, and detecting the edge position of the substrate for plane coordinates parallel with a surface for processing the substrate; a means for storing the coordinate information (a), (b) of the edge position of the substrate for every transfer chance of the substrate; a means for operating the positional slippage of the substrate by comparing the coordinate information (a), (b) detected by the detection means 11 and 12 with previously registered coordinate information of regular position when the substrate is transferred; and a means for mounting the substrate on the transferred place while correcting the substrate conveyance track of the transfer means based on the positional slippage. The semiconductor production equipment is further provided with a calibration function for automatically acquiring parameters for operating the positional slippage by operating each means. COPYRIGHT: (C)2007,JPO&INPIT |
