发明名称 FIELD EFFECT TRANSISTOR, METHOD FOR MANUFACTURING SAME, AND ELECTRONIC DEVICE USING SAME
摘要 Provided is a field-effect transistor which has a high mobility and a low variation of mobility. A field-effect transistor at least comprising a substrate, a semiconductor layer, a source electrode, and a drain electrode is produced by forming the source electrode and/or the drain electrode so that the source electrode and/or the drain electrode has a taper shape in a cross-section which is parallel with a channel length direction and perpendicular to the substrate, and forming the semiconductor layer through coating process.
申请公布号 EP2418684(A1) 申请公布日期 2012.02.15
申请号 EP20100761720 申请日期 2010.04.07
申请人 MITSUBISHI CHEMICAL CORPORATION 发明人 OSEKI YOSUKE;SAKAI YOSHIMASA;OHNO AKIRA
分类号 H01L29/786;H01L21/336;H01L29/417;H01L29/78;H01L51/10 主分类号 H01L29/786
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