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发明名称
Method of manufacturing an electronic device with high and low resolution patterned film features
摘要
申请公布号
EP1672717(B1)
申请公布日期
2012.02.15
申请号
EP20050112386
申请日期
2005.12.19
申请人
PALO ALTO RESEARCH CENTER INCORPORATED
发明人
STREET, ROBERT A.;WONG, WILLIAM S.;CHABINYC, MICHAEL L.;SALLEO, ALBERTO
分类号
H01L51/40
主分类号
H01L51/40
代理机构
代理人
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地址
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