X-RAY INSPECTION DEVICE AND METHOD FOR X-RAY INSPECTION

摘要

An X-ray inspection apparatus (100) includes a scanning X-ray source (10) for emitting an X-ray, an X-ray detector drive unit (22) having a plurality of X-ray detectors (23) mounted thereon and being capable of independently driving the plurality of X-ray detectors (23), and an image acquisition control mechanism (30) for controlling the X-ray detector drive unit (22) and acquisition of image data from the X-ray detectors (23). The scanning X-ray source (10) emits an X-ray by moving an X-ray focal point position of the X-ray source to each of originating point positions of X-ray emission, which are set for the X-ray detectors (23) such that X-rays are transmitted through a plurality of prescribed inspection areas of an inspection object (20) and enter the X-ray detectors (23). Image pickup by the X-ray detector (23) and movement of another X-ray detector (23) not picking up an image to an image pickup position are concurrently performed in an alternate manner. The image acquisition control mechanism (30) acquires image data detected by the X-ray detectors (23), and an operation unit (70) reconstructs an image of the inspection area based on the image data.