| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate cleaning liquid capable of cleaning numerous substrates without corroding a copper wire by keeping effects of an anticorrosive in the substrate cleaning liquid for a long time. SOLUTION: The substrate cleaning liquid contains fluoride salt, an anticorrosive, a surfactant, and an aqueous solvent. The anticorrosive is a triazole compound. The surfactant is one or more selected from a group including polyether polyol, alkylbetaine, phosphoric acid ester compound, and polystyryl phenylether. COPYRIGHT: (C)2008,JPO&INPIT
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