Manufacturing method of tantalum nitride encapsulated with silica and tantalum nitride manufactured by the method,申请号KR20090031130-传众专利搜索

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发明名称	Manufacturing method of tantalum nitride encapsulated with silica and tantalum nitride manufactured by the method
摘要
申请公布号	KR101110369(B1)	申请公布日期	2012.02.15
申请号	KR20090031130	申请日期	2009.04.10
申请人		发明人
分类号	C01G35/00;C01B21/06	主分类号	C01G35/00
代理机构		代理人
主权项
地址

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