| 摘要 |
A bond pad structure located over an active circuit structure is disclosed. The bond pad structure includes a bond pad, a passivation layer and a topmost metal layer in the active circuit structure. The passivation layer covers the bond pad and has an opening, and the opening exposes a part of the bond pad. The part of the topmost metal layer located under the opening serves as a supporting layer. The supporting layer has at least a slot, and the topmost metal layer is electrically connected to the bond pad through a plurality of via plugs. |
