| 摘要 |
A detector for an electron column and a detecting method thereof are provided to directly detect the electrons from the sample by using a wire which is formed on a sample. Electrons emitted from an electron emission source are converted into an electron beam in a shape given by a source lens, and then the beam is deflected by a deflector and finally focused on a sample by a focus lens. A detector(20) detects electrons resulting from collision of the electron beam on the sample as well as secondary electrons from the sample. While the electrons are moving from the sample, the electric current produced by the electrons hitting the detector is analyzed.
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