发明名称 |
Piezoelectric microphone, speaker, microphone-speaker integrated device and manufacturing method thereof |
摘要 |
A piezoelectric microphone, a speaker, a microphone-speaker integrated device and a manufacturing method thereof are provided. The microphone-speaker integrated device includes a silicon substrate and an insulating layer deposited on the silicon substrate; a piezoelectric plate formed on the insulating layer; and a mating electrode formed on the piezoelectric plate. The mating electrode is patterned with a polarity arrayed in series. |
申请公布号 |
US8114697(B2) |
申请公布日期 |
2012.02.14 |
申请号 |
US20080195311 |
申请日期 |
2008.08.20 |
申请人 |
KIM HYE JIN;LEE SUNG Q;LEE SANG KYUN;LEE JAE WOO;PARK KANG HO;KIM JONG DAE;ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
KIM HYE JIN;LEE SUNG Q;LEE SANG KYUN;LEE JAE WOO;PARK KANG HO;KIM JONG DAE |
分类号 |
H01L21/00;H04R25/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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